Sub-microradian surface slope metrology with the ALS...

Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment 2010 Vol. 616; Iss. 2-3

Sub-microradian surface slope metrology with the ALS Developmental Long Trace Profiler

Valeriy V. Yashchuk, Samuel Barber, Edward E. Domning, Jonathan L. Kirschman, Gregory Y. Morrison, Brian V. Smith, Frank Siewert, Thomas Zeschke, Ralf Geckeler, Andreas Just
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Volume:
616
Year:
2010
Language:
english
Pages:
12
DOI:
10.1016/j.nima.2009.10.175
File:
PDF, 1.23 MB
english, 2010
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