Effect of Si2H6 as a gas phase additive to increase growth rate of a-Si:H films and solar cells
Zhu, Lala, Das, Ujjwal K, Das, Chandan, Hegedus, Steven SVolume:
1426
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/opl.2012.1181
Date:
January, 2012
File:
PDF, 363 KB
english, 2012