Effect of oxygen on the reactions in the Si/Ta/Cu...

Journal of Materials Research 2001 / 10 Vol. 16; Iss. 10

Effect of oxygen on the reactions in the Si/Ta/Cu metallization system

Laurila, Tomi, Zeng, Kejun, Kivilahti, Jorma K., Molarius, Jyriki, Suni, Ilkka
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Volume:
16
Language:
english
Journal:
Journal of Materials Research
DOI:
10.1557/JMR.2001.0404
Date:
October, 2001
File:
PDF, 663 KB
english, 2001
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