Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2005 Vol. 228; Iss. 1-4
Annealing of vacancy complexes in P-doped silicon
M.G. Ganchenkova, V.A. Borodin, R.M. NieminenVolume:
228
Year:
2005
Language:
english
Pages:
8
DOI:
10.1016/j.nimb.2004.10.047
File:
PDF, 439 KB
english, 2005