Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2005 Vol. 234; Iss. 3
Determination of the electron beam irradiated area by using a new procedure deriving from the electron beam lithography technique
K. Zarbout, G. Moya, A. KallelVolume:
234
Year:
2005
Language:
english
Pages:
8
DOI:
10.1016/j.nimb.2005.01.004
File:
PDF, 242 KB
english, 2005