Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2005 Vol. 238; Iss. 1-4
Influence of plasma treatment on low-k dielectric films in semiconductor manufacturing
P. Yang, D. Lu, R. Kumar, H.O. MoserVolume:
238
Year:
2005
Language:
english
Pages:
4
DOI:
10.1016/j.nimb.2005.06.068
File:
PDF, 231 KB
english, 2005