Influence of plasma treatment on low-k dielectric films in...

Influence of plasma treatment on low-k dielectric films in semiconductor manufacturing

P. Yang, D. Lu, R. Kumar, H.O. Moser
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Volume:
238
Year:
2005
Language:
english
Pages:
4
DOI:
10.1016/j.nimb.2005.06.068
File:
PDF, 231 KB
english, 2005
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