Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2005 Vol. 241; Iss. 1-4
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Inspection applications with higher electron beam energies
D.R. Norman, J.L. Jones, W.Y. Yoon, K.J. Haskell, J.W. Sterbentz, J.M. Zabriskie, A.W. Hunt, F. Harmon, M.T. KinlawVolume:
241
Year:
2005
Language:
english
Pages:
6
DOI:
10.1016/j.nimb.2005.07.133
File:
PDF, 370 KB
english, 2005