Characteristics in SiC-CMP using MnO2 slurry with Strong...

MRS Proceedings 2013 Vol. 1560

Characteristics in SiC-CMP using MnO2 slurry with Strong Oxidant under Different Atmospheric Conditions

Kurokawa, Syuhei, Doi, Toshiro, Ohnishi, Osamu, Yamazaki, Tsutomu, Tan, Zhe, Yin, Tao
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Volume:
1560
Year:
2013
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/opl.2013.903
File:
PDF, 623 KB
english, 2013
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