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ECS Transactions [ECS 218th ECS Meeting - Las Vegas, NV (October 10 - October 15, 2010)] - The Impact of Helium Co-Implantation on Hydrogen Induced Donor Profiles in Float Zone Silicon
Laven, Johannes, Job, Reinhart, Schulze, Hans-Joachim, Niedernostheide, Franz-Josef, Häublein, Volker, Schulze, Holger, Schustereder, Werner, Ryssel, Heiner, Frey, LotharYear:
2010
Language:
english
DOI:
10.1149/1.3485682
File:
PDF, 1.30 MB
english, 2010