Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2006 Vol. 245; Iss. 1
Role of electronic and nuclear energy losses in swift heavy ion beam induced epitaxial crystallization of a buried Si3N4 layer
T. Som, B. Satpati, O.P. Sinha, D.K. Avasthi, D. KanjilalVolume:
245
Year:
2006
Language:
english
Pages:
5
DOI:
10.1016/j.nimb.2005.11.112
File:
PDF, 227 KB
english, 2006