Micromachining of mesoporous oxide films for...

Micromachining of mesoporous oxide films for microelectromechanical system structures

Paik, Jong-Ah, Fan, Shih-Kang, Kim, Chang-Jin, Wu, Ming C., Dunn, Bruce
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Volume:
17
Language:
english
Journal:
Journal of Materials Research
DOI:
10.1557/JMR.2002.0313
Date:
August, 2002
File:
PDF, 436 KB
english, 2002
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