Quantum effects in ion implanted devices

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2006 Vol. 249; Iss. 1-2

Quantum effects in ion implanted devices

D.N. Jamieson, V. Chan, F.E. Hudson, S.E. Andresen, C. Yang, T. Hopf, S.M. Hearne, C.I. Pakes, S. Prawer, E. Gauja, A.S. Dzurak, R.G. Clark
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Volume:
249
Year:
2006
Language:
english
Pages:
5
DOI:
10.1016/j.nimb.2006.04.002
File:
PDF, 352 KB
english, 2006
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