Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2006 Vol. 249; Iss. 1-2
Study of SiO2 surface sputtering by a 250–550 keV He+ ion beam during high-resolution Rutherford backscattering measurements
Susumu Kusanagi, Hajime KobayashiVolume:
249
Year:
2006
Language:
english
Pages:
4
DOI:
10.1016/j.nimb.2006.04.043
File:
PDF, 250 KB
english, 2006