Proton beam writing of microstructures at the ion nanoprobe...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2006 Vol. 250; Iss. 1-2

Proton beam writing of microstructures at the ion nanoprobe LIPSION

F. Menzel, D. Spemann, S. Petriconi, J. Lenzner, T. Butz
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Volume:
250
Year:
2006
Language:
english
Pages:
5
DOI:
10.1016/j.nimb.2006.04.083
File:
PDF, 342 KB
english, 2006
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