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Vibrational Lifetimes of Hydrogen in Silicon: Isotope Effects and MOSFET Reliability
Lüpke, Gunter, Sun, Baozhou, Tolk, Norman H., Feldman, Leonard C.Volume:
813
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-813-H7.1
Date:
January, 2004
File:
PDF, 170 KB
english, 2004