![](/img/cover-not-exists.png)
Improvement of Integrated Pressure Sensor Systems Fabricated by a Combined CMOS- and MEMS-Technology with Regard to Low Pressure Ranges
Schreiber-Prillwitz, W., Job, R.Volume:
49
Language:
english
Journal:
ECS Transactions
DOI:
10.1149/04901.0417ecst
Date:
August, 2012
File:
PDF, 286 KB
english, 2012