Improvement of Integrated Pressure Sensor Systems...

Improvement of Integrated Pressure Sensor Systems Fabricated by a Combined CMOS- and MEMS-Technology with Regard to Low Pressure Ranges

Schreiber-Prillwitz, W., Job, R.
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Volume:
49
Language:
english
Journal:
ECS Transactions
DOI:
10.1149/04901.0417ecst
Date:
August, 2012
File:
PDF, 286 KB
english, 2012
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