Dependence of Si+ and Si2+ sputtering yields on residual...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2011 Vol. 269; Iss. 9

Dependence of Si+ and Si2+ sputtering yields on residual oxygen impurity

Yasuhiro Sakuma, Masahiko Kato, Shinya Yagi, Kazuo Soda
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Volume:
269
Year:
2011
Language:
english
Pages:
4
DOI:
10.1016/j.nimb.2010.12.028
File:
PDF, 453 KB
english, 2011
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