Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2011 Vol. 269; Iss. 7
Versatile plasma ion source with an internal evaporator
M. Turek, S. Prucnal, A. Drozdziel, K. PyszniakVolume:
269
Year:
2011
Language:
english
Pages:
8
DOI:
10.1016/j.nimb.2011.01.133
File:
PDF, 1.07 MB
english, 2011