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Nondestructive Observation of Depths and Dimensions of Subsurface Microdefects in Czochralski-Grown and Epitaxial Silicon Wafers
Saito, Hiroyuki, Goto, Hiroyuki, Isogai, Maki, Shirai, Hiroshi, Aiba, YoshiroVolume:
149
Year:
2002
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.1491239
File:
PDF, 81 KB
english, 2002