(Invited) Surface Preparation and In/Ga Alloying Effects on InGaAs(001)-(2x4) Surfaces For ALD Gate Oxide Deposition
Edmonds, M., Melitz, W., Kent, T. J., Chagarov, E., Kummel, A. C.Volume:
50
Language:
english
Journal:
ECS Transactions
DOI:
10.1149/05004.0129ecst
Date:
March, 2013
File:
PDF, 212 KB
english, 2013