[ECS 23rd Symposium on Microelectronics Technology and Devices - Gramado, Brazil (September 1 - September 4, 2008)] ECS Transactions - Thermal Oxide Passivation by Corona Charges
Ramos, Carlos Alberto S., Sánchez, Manuel C., Onmori, Roberto K., Stem, NairVolume:
14
Year:
2008
Language:
english
DOI:
10.1149/1.2956071
File:
PDF, 416 KB
english, 2008