3D TSV - Influence of electrolyte composites and anneal...

MRS Proceedings 2013 Vol. 1560

3D TSV - Influence of electrolyte composites and anneal temperatures to copper protrusion and planarization

Rudolph, Catharina, Wachsmuth, Holger, Bartusseck, Irene, Parthenopoulos, Michael, Goerner, Loana, Boettcher, Mathias, Grafe, Juergen, Wolf, Juergen M.
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Volume:
1560
Year:
2013
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/opl.2013.904
File:
PDF, 663 KB
english, 2013
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