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Assessment of Planarization length variation by the Step-Polish-Response (SPR) Method
Bartha, Johann. W., Bormann, Tilo, Estel, Kathrin, Zeidler, DieterVolume:
816
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-816-K8.5
Date:
January, 2004
File:
PDF, 231 KB
english, 2004