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Proton formation and diffusion in amorphous SiNx:H
Dekkers, H.F.W., Prajapati, V., Van Elshocht, S., Vancoille, E.Volume:
1330
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/opl.2011.1252
Date:
January, 2011
File:
PDF, 569 KB
english, 2011