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Growth kinetics of chemically vapor deposited SiO2 films from silane oxidation
Ojeda, Fernando, Castro-García, Alejandro, Gómez-Aleixandre, Cristina, Albella, José MaríaVolume:
13
Language:
english
Journal:
Journal of Materials Research
DOI:
10.1557/JMR.1998.0322
Date:
August, 1998
File:
PDF, 176 KB
english, 1998