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Epitaxial PZT films for MEMS printing applications
Funakubo, Hiroshi, Dekkers, Matthijn, Sambri, Alessia, Gariglio, Stefano, Shklyarevskiy, Igor, Rijnders, GuusVolume:
37
Language:
english
Journal:
MRS Bulletin
DOI:
10.1557/mrs.2012.271
Date:
November, 2012
File:
PDF, 993 KB
english, 2012