Epitaxial PZT films for MEMS printing applications

Funakubo, Hiroshi, Dekkers, Matthijn, Sambri, Alessia, Gariglio, Stefano, Shklyarevskiy, Igor, Rijnders, Guus

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Volume:

Language:

english

Journal:

MRS Bulletin

DOI:

10.1557/mrs.2012.271

Date:

November, 2012

File:

PDF, 993 KB

english, 2012

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