The Impact of Dielectric Films and Post-Metal Etch Wet Treatment on Charge-Induced Corrosion of Tungsten Vias
Lee, Szetsen, Ni, Chi-JungVolume:
990
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-0990-B03-17
Date:
January, 2007
File:
PDF, 309 KB
english, 2007