ECS Transactions [ECS 218th ECS Meeting - Las Vegas, NV (October 10 - October 15, 2010)] - The Study of the Bonding Energy on Silicon-to-Glass Wafer Bonding
Chuang, Ta-Ko, Usenko, Alex, Cites, JefferyYear:
2010
Language:
english
DOI:
10.1149/1.3483541
File:
PDF, 176 KB
english, 2010