Silicon Surface Texturization Mechanism by Hydrogen Radicals Using Tungsten Hot Filament
Nagayoshi, Hiroshi, Sato, Hiroaki, Nishimura, Suzuka, Terashima, KazutakaVolume:
891
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-0891-EE07-21
Date:
January, 2005
File:
PDF, 1.03 MB
english, 2005