Molecular Dynamics Study on Resolution in Nanoimprint Lithography for Glass Material
Tada, Kazuhiro, Yasuda, Masaaki, Kimoto, Yoshihisa, Kawata, Hiroaki, Hirai, YoshihikoVolume:
1179
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-1179-BB06-11
Date:
January, 2009
File:
PDF, 364 KB
english, 2009