A Tribochemical Study of Ceria-Silica Interactions for CMP

Abiade, Jeremiah T., Yeruva, Suresh, Choi, Wonseop, Moudgil, Brij M., Kumar, Dhananjay, Singh, Rajiv K.

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Volume:

153

Year:

2006

Language:

english

Journal:

Journal of The Electrochemical Society

DOI:

10.1149/1.2349357

File:

PDF, 140 KB

english, 2006

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