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A Tribochemical Study of Ceria-Silica Interactions for CMP
Abiade, Jeremiah T., Yeruva, Suresh, Choi, Wonseop, Moudgil, Brij M., Kumar, Dhananjay, Singh, Rajiv K.Volume:
153
Year:
2006
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.2349357
File:
PDF, 140 KB
english, 2006