The Electrical Phenomena of Non-planar Structure and...

MRS Proceedings 2005 / 1 Vol. 864

The Electrical Phenomena of Non-planar Structure and Devices using Plasma Doping

Yang, Jong-Heon, Baek, In-Bok, Im, Kiju, Ahn, Chang-Geun, Baek, Sungkweon, Cho, Won-ju, Lee, Seongjae
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Volume:
864
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-864-E9.15
Date:
January, 2005
File:
PDF, 243 KB
english, 2005
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