![](/img/cover-not-exists.png)
DEFECT SELECTIVE ETCHING OF THICK AlN LAYERS GROWN ON 6H-SIC SEEDS – A TRANSMISSION ELECTRON MICROSCOPY STUDY
Nyakiti, Luke Owuor, Chaudhuri, Jharna, Kenik, Ed A, Lu, Peng, Edgar, James HVolume:
1040
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-1040-Q11-03
Date:
January, 2007
File:
PDF, 3.78 MB
english, 2007