[ECS ISTC/CSTIC 2009 (CISTC) - Shanghai, China (March 19 - March 20, 2009)] ECS Transactions - Electrical Characterization of Mos Memory Devices with Self-Assembled Tungsten Nano-Dots Dispersed in Silicon Nitride
Pei, Yanli, Yin, Chengkuan, Nishijima, Masahiko, Kojima, Toshiya, Noriha, Hiroshi, Fukushima, Takafumi, Tanaka, Tetsu, Koyanagi, MitsumasaYear:
2009
Language:
english
DOI:
10.1149/1.3096423
File:
PDF, 928 KB
english, 2009