Surface Treatment Effect on the Grain Size and Surface Roughness of as-Deposited LPCVD Polysilicon Films
Voutsas, Apostolos T.Volume:
140
Year:
1993
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.2056103
File:
PDF, 2.57 MB
english, 1993