Swift Heavy Ion Beam-Based Nanopatterning Using...

MRS Proceedings 2007 / 1 Vol. 1020

Swift Heavy Ion Beam-Based Nanopatterning Using Self-Assembled Masks

Jensen, Jens, Sanz, Ruy, Skupinski, Marek, Hernandez-Vélez, Manuel, Possnert, Göran, Hjort, Klas
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Volume:
1020
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-1020-GG02-06
Date:
January, 2007
File:
PDF, 2.45 MB
english, 2007
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