Physical and Electrical Properties of Thin Doped Silicon...

ECS Journal of Solid State Science and Technology 2013 / 11 Vol. 2; Iss. 12

Physical and Electrical Properties of Thin Doped Silicon Films Obtained by Low Temperature Smart Cut and Solid Phase Epitaxy

Gaudin, G., Van Den Daele, W., Chartrain, N., Riou, G., Veytizou, C., Radu, I., Cristoloveanu, S.
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Volume:
2
Language:
english
Journal:
ECS Journal of Solid State Science and Technology
DOI:
10.1149/2.012312jss
Date:
November, 2013
File:
PDF, 1.72 MB
english, 2013
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