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PDL free plasma enhanced chemical vapor deposition SiC optical waveguides and devices
G. Pandraud, P.M. Sarro, P.J. FrenchVolume:
269
Year:
2007
Language:
english
Pages:
8
DOI:
10.1016/j.optcom.2006.08.022
File:
PDF, 410 KB
english, 2007