Effects of sputtering atmosphere on the properties of...

Journal of Materials Science: Materials in Electronics 2015 / 1 Vol. 26; Iss. 1

Effects of sputtering atmosphere on the properties of c-plane ScAlN thin films prepared on sapphire substrate

Zhang, Yao, Zhu, Weixin, Zhou, Dong, Yang, Yixi, Yang, Chengtao
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Volume:
26
Language:
english
Journal:
Journal of Materials Science: Materials in Electronics
DOI:
10.1007/s10854-014-2423-z
Date:
January, 2015
File:
PDF, 3.80 MB
english, 2015
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