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Modeling of silicon nanoparticle formation in inductively coupled plasma using a modified collision frequency function
Kim, Yeongseok, Kim, Hyeong U, Shin, Yonghyeon, Kang, Sangwoo, Kim, TaesungVolume:
28
Language:
english
Journal:
Journal of Mechanical Science and Technology
DOI:
10.1007/s12206-014-1036-z
Date:
November, 2014
File:
PDF, 1.37 MB
english, 2014