Highly sensitive trace moisture ball surface acoustic wave...

Japanese Journal of Applied Physics 2014 / 07 Vol. 53; Iss. 7S

Highly sensitive trace moisture ball surface acoustic wave sensor using SiO x film

Hagihara, Satoshi, Tsuji, Toshihiro, Oizumi, Toru, Takeda, Nobuo, Akao, Shingo, Ohgi, Tsuneo, Takayanagi, Kosuke, Yanagisawa, Takayuki, Nakaso, Noritaka, Tsukahara, Yusuke, Yamanaka, Kazushi
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Volume:
53
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.53.07KD08
Date:
July, 2014
File:
PDF, 276 KB
english, 2014
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