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Effect of anomalous transmittance in EUV multilayer optics
Igor Kozhevnikov, Sergiy Yulin, Torsten Feigl, Norbert KaiserVolume:
281
Year:
2008
Language:
english
Pages:
7
DOI:
10.1016/j.optcom.2008.01.057
File:
PDF, 375 KB
english, 2008