Effect of Krypton Addition on Electron Cyclotron Resonance-Radio Frequency Hybrid Oxygen Plasma for Patterning Diamond Surfaces
Lei, Wang, Hongyong, Wang, Bo, Ke, Fang, Ding, Mudi, Chen, Haiyang, Zhou, Xiaodong, ZhuVolume:
12
Language:
english
Journal:
Plasma Science and Technology
DOI:
10.1088/1009-0630/12/1/07
Date:
February, 2010
File:
PDF, 2.22 MB
english, 2010