Gettering of Luminescent Point Defects along Step Bunching...

Journal of Electronic Materials 2015 / 5 Vol. 44; Iss. 5

Gettering of Luminescent Point Defects along Step Bunching in 4H-SiC Epitaxial Layers by Ultraviolet Excitation

Mahadik, N.A., Stahlbush, R.E.
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Volume:
44
Language:
english
Journal:
Journal of Electronic Materials
DOI:
10.1007/s11664-014-3616-1
Date:
May, 2015
File:
PDF, 1.32 MB
english, 2015
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