Deposition of protective coatings in rf organosilicon discharges
Zajíčková, L, Buršíková, V, Kučerová, Z, Franta, D, Dvořák, P, Šmíd, R, Peřina, V, Macková, AVolume:
16
Language:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/0963-0252/16/1/S14
Date:
February, 2007
File:
PDF, 90 KB
english, 2007