Pulsed Laser Deposition Parameter Optimization for Growth...

Pulsed Laser Deposition Parameter Optimization for Growth of Alumina (Al2O3) Thin Film on Silicon (100)

Wang, Xinyu, Yarmolenko, Sergey, Kumar, Dhananjay, Xu, Zhigang, Sankar, Jagannathan
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Volume:
788
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-788-L3.39
Date:
January, 2003
File:
PDF, 148 KB
english, 2003
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