Pulsed Laser Deposition Parameter Optimization for Growth of Alumina (Al2O3) Thin Film on Silicon (100)
Wang, Xinyu, Yarmolenko, Sergey, Kumar, Dhananjay, Xu, Zhigang, Sankar, JagannathanVolume:
788
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-788-L3.39
Date:
January, 2003
File:
PDF, 148 KB
english, 2003