Effects of Growth Parameters on Surface-morphological, Structural, Electrical and Optical Properties of AZO Films by RF Magnetron Sputtering
Kuo, Shou-Yi, Lin, Wei-Ting, Chang, Liann-Be, Jeng, Ming-Jer, Lu, Yong-Tian, Hu, Sung-ChengVolume:
1201
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-1201-H05-32
Date:
January, 2009
File:
PDF, 178 KB
english, 2009