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Demagnifying high-resolution imaging based on a new system for nanolithography
Qingqing Meng, Xiaoping Zhang, Lin Cheng, Pengfei Cao, Yuee Li, Xin JinVolume:
284
Year:
2011
Language:
english
Pages:
4
DOI:
10.1016/j.optcom.2011.04.007
File:
PDF, 988 KB
english, 2011