Laser diagnostics of nanoscale dielectric films on...

Laser diagnostics of nanoscale dielectric films on transparent substrate by integrating differential reflectivity and ellipsometry

P Adamson
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Volume:
36
Year:
2004
Language:
english
Pages:
8
DOI:
10.1016/j.optlastec.2004.01.022
File:
PDF, 320 KB
english, 2004
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