AFM investigations of chemical-mechanical processes on silicon(100) surfaces
Iomoto, Ruiji, Stevens, Forrest, Langford, Steven, Dickinson, TomVolume:
991
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-0991-C04-01
Date:
January, 2007
File:
PDF, 596 KB
english, 2007